Application of O2 /Ar plasma jet on metal surface cleaning
JIN Ying
SHI Dong-mei
Abstract：In this paper,O2/Ar plasma jet is produced by use of discharge instruments designed double quartz tube with two high voltage. And then,theinfluence on discharge characteristics and the cleaning effect by oxygen mixing ratio is studied. The results show that electron play an important role and there is an optimum mix-ture ratio in the process of cleaning.
Keywords：two high voltageplasma jetoxygenmixture ratiocleaning
Publication Date：2017-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 30-35 )