Change regulation of natural frequencies for silicon microcantilever under the curvature status
YANG Yi-liu
SHE Dong-sheng
YU Zhen
Abstract：To study the effect of curvature on the natural frequencies of microcantilvers , the finite element a-nalysis method was used to obtain the first five modal natural frequencies of silicon microcantilevers with different radiuses of curvature .Two kinds of microcantilevers were analyzed , the microcantilever with large ratio of length to width and the microcantilever with small ratio of length to width .The results show that the effect of curvature on the natural frequencies of microcantilver with small ratio of length to width can be neglected .But for micro-cantilever 2#, the change ratios of the first , the second , the third and the fifth natural frequencies are 1%, 26%, 40%and 15.8%respectively when the radius of curvature was equal to 1 mm.The change ratio of the fourth natural frequency microcantilever 2#is 13.7%when the radius of curvature was equal to 3 mm.It can be seen that for the microcantilever with large ratio of length to width , there is no obvious effect on its first order nat-ural frequency , but great influence on the second , the third, the fourth and the fifth natural frequencies .
Keywords：microcantilevercurvaturenatural frequencyfinite element analysisradius of curvature
Publication Date：2016-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：7( 271-277 )