Motion simulation and experimental research of lapping CVD diamond film with fixed abrasive
LUO He-ping
LIU Yong-ji
HE Yan
JI Jun
YUAN Ze-wei
Abstract：With the expanding of the application scope of CVD diamond film,it has transformed from the traditional fields of cutting tool to high frequency communications,optoelectronics,microelectronics industry,etc.In this paper,firstly,motion model is established between pads and artifacts by theoretical analysis and the trajectory equation of workpiece is determined,and then movement simulation of polishing experiment has been carried out by using Matlab.Finally,electroplated diamond was carried out for polishing experiment,and optical microscope and Talysurf are used respectively for measuring surface morphology and surface roughness.
Keywords：CVD diamond filmmotion simulationelectroplated diamond platepolishing
Publication Date：2017-11-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：4( 42-45 )