Design and analysis on 2-DOF precision micro-positioning stage for long stroke without coupling
XU Fang-chao
LU He
SUN Feng
DUAN Zhen-yun
Keywords：micro-positioning stagediamond displacement amplificationpiezo actuatorlong stroke
Publication Date：2016-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 56-60 )