The Influence of Deposition Parameters on the Microstructure and Deposition Mechanism of Low-temperature Isotropic Pyrocarbon on a Bed of Fluidized Particles

ZHANG Jian-hui; RUAN Ye-peng; LUO Bi-hui; ZHENG Yan-zhen

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Home>Articles>The Influence of Deposition Parameters on the Microstructure and Deposition Mechanism of Low-temperature Isotropic Pyrocarbon on a Bed of Fluidized Particles

The Influence of Deposition Parameters on the Microstructure and Deposition Mechanism of Low-temperature Isotropic Pyrocarbon on a Bed of Fluidized Particles

ZHANG Jian-hui

RUAN Ye-peng

LUO Bi-hui

ZHENG Yan-zhen

Keywords：chemical vapour depositionfluidized bedlow-temperature isotropic pyrocarbon (LTIC)deposition conditionsmicrostructuredeposition mechanism

Publication Date：2019-12-30

Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)

Pages：10( 145-154 )

Chinese Journal of Biomedical Engineering

ISSN：1004-0552

Year, Vol.(Issue)：2019,28(4)