Research on the Effects of Surface Performance of Silicon Wafers Under Different C+ Implantation Energy
ZHANG De-kun
GE Shi-rong
WANG Qing-liang
LIU jin-long
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Publication Date：2006-11-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 713-717,731 )