Thermodynamic Analysis of a New CVD Process for Preparation of Nano-sized SiC/Si3N4 Composite Powder

Quan Xue-jun; Shoichi Kimura

doi:10.3969/j.issn.1008-5548.2000.06.005

Home>Articles>Thermodynamic Analysis of a New CVD Process for Preparation of Nano-sized SiC/Si3N4 Composite Powder

DOI: 10.3969/j.issn.1008-5548.2000.06.005

Thermodynamic Analysis of a New CVD Process for Preparation of Nano-sized SiC/Si3N4 Composite Powder

Quan Xue-jun

Shoichi Kimura

Abstract：The mechanical properties and synthesis methods of silicon carbide and silicon nitride composite powders are reviewed.A new idea is put forward for the preparation of nano-sized SiC/Si3N4 composite powders and a thermodynamic analysis is made to predict the synthesis conditions.

Keywords：silicon carbidesilicon nitridecomposite powderCVD processthermodynamic analysis

Publication Date：2000-01-01

Online Publishing Date：2026-05-22(First online date of this platform, not the publication date of the document)

Pages：7( 14-20 )

CHINA POWDER SCIENCE AND TECHNOLOGY

PKUISTIC

ISSN：1008-5548

Year, Vol.(Issue)：2000,6(6)