Simulation of Effect of the Initial Distributions of Silicon and Oxygen Concentrations on the V-O2 Pair's Evolution in Silicon Monocrystalline Wafer
GUAN Xiaojun
GUAN Yuxin
WANG Shanwen
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Publication Date：2021-12-30
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：8( 35-42 )