Simulation of Evolutional Effect of Low-temperature Annealing Temperature on V-O2 Pairs in Silicon Monocrystalline Wafer
GUAN Xiaojun
GUAN Yuxin
WANG Shanwen
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Publication Date：2021-03-30
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 1-6 )