Simulation of Effect of Initial Vacancy Concentration on the V-O2 Pair＇s Evolution in Silicon Monocrystalline Wafer
GUAN Xiaoj un
GUAN Yuxin
WANG Shanwen
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Publication Date：2020-03-30
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 6-11 )