Simulation Model for V-O2 Pair's Evolution in Silicon Monocrystalline Wafer Based on Phase Field Theory
GUAN Xiaojun
GUAN Yuxin
WANG Shanwen
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Publication Date：2019-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 1-6 )