Phase-field Modeling of Void Dynamics during CZ Silicon Growth with Radial Vacancy Diffusion
ZHANG Xiang-yu
GUAN Xiao-jun
ZENG Qing-kai
PAN Zhong-ben
ZHANG Huai-jin
WANG Jin
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Publication Date：2013-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 41-45 )