Design and fabrication for mask of interdigitated electrodes
YANG Li-e
Abstract：Aiming at the complex mask preparation and high cost in the fabrication of interdigitated electrodes (IDEs), a fabrication method for transparent mask of IDEs was proposed.The IDEs with three different patterns including finger-shape, spiral-shape and square-shape were designed with AutoCAD software.The patterns of IDEs were fabricated into the transparent mask with the transparent paper and inkjet printer.The patterns of IDEs on the transparent mask were transferred to the aluminum metal layer on the silicon wafer with the conventional photolithography technology.In addition, the IDEs and the patterns of IDEs were observed with high magnification microscope.Through applying the proposed method to solar cells and testing the electrical characteristics of solar cells, the practicality of the proposed method in the field of solar cells is confirmed.
Keywords：interdigitated electrodes (IDEs)transparent maskphotolithographyphotoresistinkjet printingAutoCAD softwareetchingsolar cell
Publication Date：2017-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 159-164 )