Improved cross-coupled contour control for three axis motion table
WANG Li-mei
LIN Wei-wei
Keywords:three axis motion tablepermanent magnet linear synchronous motor (PMLSM)contour error estimation methodPDFF controllercross-coupled control (CCC)tracking responsetracking errorcontour accuracy
Publication Date:2016-01-01
Online Publishing Date:2025-08-15(First online date of this platform, not the publication date of the document)
Pages:6( 361-366 )
