Surface morphology of monocrystalline silicon irradiated by long pulse laser
GUO Ming
JIN Guang-yong
GAO Xun
ZHANG Wei
Keywords：millisecond laserpulse laserdamagemonocrystalline siliconsurface morphologymicrostructurecleavagephase transition
Publication Date：2015-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 548-552 )