Electromechanical coupling finite element modeling of PMLSM direct drive worktable
Abstract：The dynamic characteristics of feed worktable directly driven by permanent magnet linear synchronous motor（PMLSM） and supported by linear rolling guide will directly affect the machining accuracy of super-precision numerical control machine tool.With taking both worktable and PMLSM mover as the research object,the electromechanical coupling dynamics model of the worktable system was established by adopting the Lagrange-Maxwell equation.The thrust and normal forces of PMLSM were calculated with finite element method（FEM）.The modal analysis and harmonic response analysis under the effect of electromagnetic force were performed for the worktable model,and the modal parameters and the frequency response curves in both horizontal and normal directions of worktable system were obtained.The vibration of worktable can be predicted through analyzing the frequency response curves,which provides the basis for the optimal design and control of worktable system.
Keywords：PMLSMdirect drivedynamics analysiselectromechanical couplingFEMthrust forcenormal forcesuper-precision machine tool
Publication Date：2011-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)