Design and Research of MEMS Thermal Conductivity Methane Sensor
YAN Peiyu
Abstract：Thermal conductivity gas sensors have important applications in detecting high concentration methane underground in coal mines.In order to address the shortcomings of traditional thermal conductivity gas sensors in terms of power consumption and sensitivity,a new MEMS thermal conductivity methane sensor was developed.Using MEMS technology to deposit Pt resistive thin films on silicon substrates as sensitive components,while deeply etching out micro-thermal conductivity pools.A thermal equilibrium model for MEMS thermal conductive components was established,COMSOL software was used to simulate thermal conduction and radiation,and the heat transfer situation was analyzed.Based on the constant temperature detection method,application circuits for MEMS thermal conductivity components were developed,constant temperature circuits,temperature measurement circuits,sampling circuits,etc were designed.The impact of environmental temperature on sensor signal drift was analyzed and a temperature compensation algorithm model was established.The newly designed thermal conductivity methane sensor was calibrated in the temperature and humidity chamber,and the concentration calculation coefficient and temperature compensation coefficient were obtained by fitting the curve.Experimental tests showed that the thermal conductivity methane sensor could achieve a measurement error of±10％of the true value within the range of 4％to 100％.
Keywords：constant temperature detection methodMEMS technologyheat transfer simulationthermal conductivity methane sensortemperature compensation
Publication Date：2024-08-12
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 10-15 )