Influence of Ar+ Energy and Low Energy Sputtering on Film Structure by Preparing Cu-W Thin Films with Ion Bind Sputtering
AI Yong-Ping
ZHOU Ling-Ping
CHEN Xing-Ke
LIU Jun-wei
LI Shao-Lu
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Publication Date：2005-05-02
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：3( 1-3 )