Research on Microcavity Waveguide Mach-Zender Interferometer and Its Refractive Index Sensing Performance Based on Femtosecond Laser Writing
XU Kun
XUAN Chengcong
ZHANG Yanqing
YAO Yicun
XIE Yanru
Abstract：Planar optical waveguide sensors have a unique advantage in the field of optical sensing because of their better mechanical properties and lower cross response to vibration and other factors than tradition-al optical fiber sensor structures.In this study,we use femtosecond laser writing and laser-assisted chemi-cal etching techniques to fabricate microcavity waveguide sensor structures in quartz glass.The structures are composed of symmetric branch waveguide Mach-Zehnder interferometer and optical microcavities pre-pared along the way.When the liquid to be measured is immersed in the microcavity,the sensor shows obvious interference peak shift,and its refractive index sensitivity reaches about 16311.8 nm/RIU near 1.35 refractive index.Therefore,it shows significant application potential in the field of high-sensitivity waveguide liquid sensing and biochemical sensing.
Keywords：optical waveguidefemtosecond laser micromachining technologymicrocavity sensorMach-Zehnder interferometer
Publication Date：2024-10-28
Online Publishing Date：2026-08-28(First online date of this platform, not the publication date of the document)
Pages：8( 76-83 )