Dynamic hysteresis uncertainty modeling and H∞ robust control of piezo-positioning platforms
LIU Hao-tian
ZHANG Gui-lin
ZHOU Ke-min
Abstract：This paper aims to improve the tracking accuracy and disturbance rejection capabilities of piezo-positioning platforms.Firstly,based on the Prandtl-Ishlinskii model and its inverse compensation,the frequency response model and nominal model of the pseudo-linear dynamic system were identified using pseudo-random binary signals and correlation function methods.Secondly,the uncertainties introduced during the simplification process were modeled in the frequency domain.Then,considering the effects of additive model uncertainties,external disturbances,and measurement noise,an H∞ robust controller was designed to ensure the robustness of the closed-loop system.A feedforward controller was designed based on the nominal model to ensure tracking accuracy.Finally,experimental results demonstrated that the piezo-positioning platform,under the combined action of the H∞ robust controller and feedforward controller,effectively tracked multi-amplitude and composite frequency displacement trajectories within the 1～100Hz frequency range.For multi-amplitude displacement trajectories,the relative error(RE)was kept below 5.74％,with a root mean square error(RMSE)of less than 0.7174 μm.For composite frequency displacement trajectories,the RE was under 1.31％,with an RMSE of less than 0.1375 μm.
Keywords：piezo-positioning platformspseudo-random binary signalfrequency response modelmodel uncertaintyH∞ robust control
Publication Date：2025-06-30
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：10( 1227-1236 )