A novel fault diagnosis strategy based on neighborhood preserving embedding-K nearest neighbor ratio density in semiconductor etching processes

ZHANG Cheng; ZHENG Bai-shun; GUO Qing-xiu; FENG Li-wei; LI Yuan

doi:10.7641/CTA.2019.90271

Home>Articles>A novel fault diagnosis strategy based on neighborhood preserving embedding-K nearest neighbor ratio density in semiconductor etching processes

DOI: 10.7641/CTA.2019.90271

A novel fault diagnosis strategy based on neighborhood preserving embedding-K nearest neighbor ratio density in semiconductor etching processes

ZHANG Cheng

ZHENG Bai-shun

GUO Qing-xiu

FENG Li-wei

LI Yuan

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Publication Date：2020-06-28

Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)

Pages：7( 1342-1348 )

Control Theory & Applications

ISTICPKUEICSCD

ISSN：1000-8152

Year, Vol.(Issue)：2020,37(6)