Novel contact scanning strategy based on atomic force microscope dynamic model
LIU Cun-huan
FANG Yong-chun
FAN Zhi
WANG Chao
WU Yi-nan
Abstract：Advanced atomic force microscope (AFM) scanning strategy with high speed and accuracy plays a very important role in nano-control field. A novel contact scanning strategy is designed to enhance both the scanning speed and the imaging accuracy. The strategy in this paper fully explores the property of the dynamics in piezo-ceramic and cantilever, through which the torsion angle of cantilever is able to be controlled by adjusting the input voltage of piezo-ceramic. Moreover, a novel image data fusion algorithm is proposed, wherein both forward and backward scanning images are utilized to generate a new image, which can eliminate the distortion caused by transient property in control loops and improve the accuracy of scanning image. The performance of proposed strategy is tested on AFM platform, and the experiment result shows that this novel strategy is effective in high scanning frequency. Then the superior performance of the proposed strategy is validated through the experimental comparison with the traditional AFM scanning algorithm.
Keywords：atomic force microscopycontact scanning modedynamic modelpiezo-ceramicnonlinear control
Publication Date：2019-11-28
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：9( 1920-1928 )