Scheduling for single-armed cluster tools with mixed-processing of multi-variety wafers
PAN Chun-rong
WANG Ji-peng
Abstract：To improve the production efficiency of cluster tools, wafer residency time constraints considered and without PM sharing, scheduling of single-armed cluster tools with mixed-processing of multi-variety wafers are addressed. Firstly, a resource-oriented Petri net (ROPN) model is developed to describe the wafer fabrication process. Controlled transitions are introduced into models to avoid deadlock, and time is associated with places and transitions to model activity times. Secondly, workloads among the processing steps are balanced via virtual process modules. Analytic expressions for testing schedulability are derived based on the Petri net and backward scheduling strategy. Finally, a scheduling algorithm for the steady state is presented. Meanwhile, illustrative examples are given to verify the validity of the scheduling algorithm proposed.
Keywords：cluster toolsPetri netmixed-processingschedulingwafer fabrication
Publication Date：2016-08-31
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：11( 1171-1181 )