Online estimation of time-varying metrology delay and run-to-run control co-design
WAN Li
TAN Fei
PAN Tian-hong
Keywords：run-to-run control (R2R)double exponent weighted moving average (d-EWMA)metrology delayBayesian theory
Publication Date：2016-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 92-97 )