Control and applications of ultra high precision mechatronics
YAN Peng
ZHANG Zhen
GUO Lei
LIU Peng-bo
Keywords：ultra high precision mechatronicsnano manipulationrobust controlanti-disturbance controlinternal-model based control
Publication Date：2014-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：14( 1338-1351 )