Application of active disturbance rejection control to micro-electro-mechanism system transducers
DONG Li-li
Keywords：micro-electro-mechanism system (MEMS)MEMS gyroscopeelectro-static actuatoractive disturbance rejection controlrobustness
Publication Date：2013-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：10( 1543-1552 )