Experimental Study of Generation and Spectroscopic Diagnosis of Inductively Coupled Plasma in Closed Cavity
LIN Min
XU Hao-jun
WEI Xiao-long
LIANG Hua
SU Chen
Keywords：inductively coupled plasmaplasma stealthemission spectrumelectron excitation temperatureelectron density
Publication Date：2015-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 10-14 )