Study on the tolerance property of micro-size components

ZHAO Jun-wei; XU Zhen-gao; LI Zhu

doi:10.3969/j.issn.1673-9787.2001.02.009

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DOI: 10.3969/j.issn.1673-9787.2001.02.009

Study on the tolerance property of micro-size components

ZHAO Jun-wei

XU Zhen-gao

LI Zhu

Abstract：With the advanced research and application of Microelectromechanical System（MEMS），it has been more and more important to evaluate the micro component error and its precision．The basic concept of micro-size and functional tolerance is defined，and the relationship of micro-machining error and micro-size is explored．The tolerance establishment methods of micro-compcnent are proposed as well．

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Publication Date：2001-03-02

Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)

Pages：4( 109-112 )

JOURNAL OF JIAOZUO INSTITUTE OF TECHNOLOGY

ISTICPKU

ISSN：1673-9787

Year, Vol.(Issue)：2001,20(2)