Effect of residual stress on dynamic properties of the micro-membrane
WU Huayong
LIU Wenping
Abstract：[Objective]Aiming at the residual stress problem in micro-electro-mechanical system(MEMS)films,research on the dynamic performance of micro-membrane with residual stress was conducted.[Methods]Firstly,a mathematical model of thin micro-plates with residual stress was established.The influence law of residual stress on the natural frequency and vibration mode of micro-membrane was studied,and the influence of residual stress on the transition of behavioral characteristics between plates and films was discussed.Then,the stability of micro-membrane with residual stress was studied based on the minimum potential energy principle.Measures for preventing the buckling of micro-membrane were proposed,and the vibration response of micro-membrane under harmonic excitation was analyzed.[Results]The results show that residual stress could induce the transition of behavior between plates and films;it has a significant impact on natural frequency but a slight effect on vibration mode.The instability of micro-membrane could be effectively prevented by adjusting the structural parameters and preparation process of the films.Moreover,the influences of residual stress on the natural frequency and vibration displacement of micro-membrane presented opposite variation trends.The research results have important reference significance and application value for the development of MEMS based on micro-membrane structures.
Keywords：Micro-membraneResidual stressMicro-electro-mechanical systemDynamicsStability
Publication Date：2026-01-31
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：5( 88-92 )