DESIGN OF ANTI-IMPACT MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW
ZHANG Xu
ZHAO Rui
SHI YunBo
ZU KaiXuan
ZHANG JieYu
YAN XiaoPeng
Abstract：Aiming at the damage of a low-range micro-electro-mechanical system(MEMS)acceleration sensor under tens of thousands of gn overload during the measurement of outer ballistic information of conventional weapons and ammunition,a kind of shrimp claw anti-impact micro-acceleration sensor was proposed,which could realize the index requirements of anti-overload 30 000gn and range 50gn.The finite element simulation results show that the displacement of the sensor is 0.99 µm and the sensitivity is 0.124 pF/gn under 50gn load.The maximum equivalent stress of the acceleration sensor under 30 000gn overload is reduced from 1 022.5 MPa to 84.326 MPa,which effectively improved the reliability of the sensor.
Keywords：AccelerometerImpact resistanceCapacitiveLow rangeBionic cushioning structureMicro-electro-mechanical system
Publication Date：2024-04-15
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：6( 410-415 )