STUDY ON REMOVAL MECHANISM OF SINGLE-CRYSTAL SILICON BY PLASMA DISCHARGE
ZHAI ZhiBo
LIU FeiFei
JIA GuoPing
XIN Bin
WANG YanHui
Keywords：Discharge mechanismPlasmaRemoving mechanismParameter controlSingle-crystal silicon
Publication Date：2023-10-15
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：6( 1090-1095 )