SIZE EFFECT ON THE STATIC PULL-IN INSTABILITY OF THE ELECTROSTATICALLY ACTUATED CANTILEVER MICRO-BEAMS
LU Fei
KONG ShengLi
YUAN YanQi
Machine-generated Keywords：
Publication Date：2018-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：5( 1336-1340 )