DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE
WANG ShuQin
WANG BiDou
LV DanHui
YANG Wei
SUN HaiXuan
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Publication Date：2018-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：6( 857-862 )