RESEARCH PROGRESS ON CUTTING TECHNOLOGY OF SIC MONO-CRYSTAL WAFER WITH WIRE SAW
LI Lun
LI ShuJuan
TANG AoFei
LI Yan
Keywords：SiC mono-crystal waferDiamond wire sawCutting technology with wire sawPresent researching status
Publication Date：2015-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)