ADHESION STABILITY OF SILICON MICROCANTILEVERS UNDER VAN DER WAALS FORCES
ZHANG Jian
DING JianNing
WANG Quan
ZHANG HuaZhong
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Publication Date：2007-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：4( 923-926 )