INVESTIGATION ON SEVERAL CRUCIAL FACTORS INFLUENCING THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS BY NANOINDENTATION TECHNIQUE

ZHOU XiangYang; JIANG ZhuangDe; WANG HaiRong; JIANG ZhiQiang

doi:10.3321/j.issn:1001-9669.2007.05.009

Home>Articles>INVESTIGATION ON SEVERAL CRUCIAL FACTORS INFLUENCING THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS BY NANOINDENTATION TECHNIQUE

DOI: 10.3321/j.issn:1001-9669.2007.05.009

INVESTIGATION ON SEVERAL CRUCIAL FACTORS INFLUENCING THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS BY NANOINDENTATION TECHNIQUE

ZHOU XiangYang

JIANG ZhuangDe

WANG HaiRong

JIANG ZhiQiang

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Publication Date：2007-01-01

Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)

Pages：8( 737-744 )

JOURNAL OF MECHANICAL STRENGTH

PKUISTIC

ISSN：1001-9669

Year, Vol.(Issue)：2007,29(5)