MECHANICAL MEASUREMENT SYSTEM FOR MICRO-NANO STRUCTURE BASED ON ATOMIC FORCE MICROSCOPY
BAO HaiFei
LI XinXin
ZHANG Bo
GUO JiuFu
HAN JianQian
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Publication Date：2007-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：5( 223-227 )