DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS
ZHAO JiangMing
CHEN XiaoYang
WANG XiaoJing
Machine-generated Keywords：
Publication Date：2007-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：7( 5-11 )