STUDY ON A MEMS FATIGUE TESTING DEVICE BASED ON THE RESONANCE PRINCIPLE
DING Lei
SHANG DeGuang
ZHANG DaCheng
SHEN Tong
JIA GuanHua
YAN ChuLiang
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Publication Date：2006-01-01
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：6( 684-689 )