MODELING AND SIMULATION OF MEMS DEVICES

Home>Articles>MODELING AND SIMULATION OF MEMS DEVICES

LU Shengli

HAN YongZhi

Machine-generated Keywords：

Publication Date：2005-01-01

Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)

Pages：4( 480-483 )

PKUISTIC

ISSN：1001-9669

Year, Vol.(Issue)：2005,27(4)