ON-CHIP SYSTEM FOR MEASURING MECHANICAL PROPERTIES OF SINGLE-CRYSTAL SILICON MICRO STRUCTURES
SU Caijun
WU Hao
GUO ZhanShe
MENG Yonggang
WEN ShiZhu
Machine-generated Keywords：
Publication Date：2005-07-02
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：4( 456-459 )