Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro
Drive System
Zhang Chuanwei
Li Niuniu
Yang Manzhi
Guo Wei
Xu Kejun
Ge Hongyu
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Publication Date：2020-06-15
Online Publishing Date：2026-09-12(First online date of this platform, not the publication date of the document)
Pages：5( 68-72 )