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Fabrication of Micro Gear Using Quasi-LIGA Process
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DOI:
10.3969/j.issn.1004-2539.2010.06.010
Fabrication of Micro Gear Using Quasi-LIGA Process
Machine-generated Keywords：
Publication Date：
2010-01-01
Online Publishing Date：
2026-09-12
(First online date of this platform, not the publication date of the document)
Pages：
3(
36-38
)
JOURNAL OF MECHANICAL TRANSMISSION
PKU
ISTIC
ISSN：
1004-2539
Year, Vol.(Issue)：
2010,34(6)
