Design of MEMS Thermo-Elastic Strongly Coupled Structure Optimization System
FU Yu
Abstract：To address the issue of reduced accuracy and stability caused by energy dissipation in micro-electromechanical sys-tems(MEMS),this paper focuses on the dynamic characteristics and energy dissipation mechanisms of thermoelastic strongly cou-pled structures.It investigates topology optimization techniques to achieve minimal thermoelastic damping.Based on these optimiza-tion techniques and the Matlab development environment,a design software system for optimizing MEMS thermoelastic coupling structures is developed.This system integrates theoretical models,optimization algorithms,and solution techniques,and its compu-tational accuracy is verified through numerical examples.The software provides tool support for the design of high-quality and highly stable MEMS thermoelastic strongly coupled structures.
Keywords：fully-coupled thermoelastic dampingcoupled system solutiontopology optimizationsoftware system design
Publication Date：2025-12-20
Online Publishing Date：2026-03-09(First online date of this platform, not the publication date of the document)
Pages：6( 3366-3371 )