Design and Simulation Analysis of Linear Controllable Electrothermal MEMS Micromirrors
ZHANG Bolun
LI Qingdang
ZHU Fangzhou
Abstract：Based on the electrothermal deflection structure in the field of MEMS micro mirror,this paper proposes a new struc-tural design of cantilever MEMS micro mirror,and compares the electrothermal material selection of this structure.Under the same voltage,different heating materials will have different structural deformation.At the same time,the size of MEMS micro mirror canti-lever structure is simulated and optimized.Finally,the MEMS micro mirror can change with the applied voltage.The deflection an-gle of the micro mirror is linearly controllable.
Keywords：micro-electromechanical systemlinear controllableelectromechanical systemmulti-layer structure
Publication Date：2025-01-19
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 71-76 )