Simulation Design of Electrothermal Micro Mirror with Large Angle Linear Deflection
HE Xuetai
ZHU Fangzhou
SHAO Guangxiao
LI Qingdang
Abstract：Although there are many kinds of MEMS micromirrors,there are few MEMS micromirrors that can realize large an-gle deflection,and there are few MEMS micromirrors that can realize linear deflection.In this paper,aiming at the problems of small deflection angle,uncontrollable deflection ability and inability of linear deflection of the existing MEMS micro mirror,a new electrothermal MEMS micro mirror structure is proposed.The structure has a large micro mirror reflection plane,flat and smooth mirror and high reflectivity.It can not only realize 119°large angle deflection,but also has the ability of voltage angle linear deflec-tion within 0～3 V.
Keywords：MOEMSmicro simulation of electrothermal micro mirrorlinear deflection MEMS micro mirrorlarge angle de-flection micro mirror
Publication Date：2024-10-20
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 2932-2936,2954 )