Research on Typical Parameters Testing Technology of MEMS Inertial Devices
CHEN Bo
LIU Luyang
LV Bing
YANG Jingyang
LV Yue
Abstract：This paper introduces the concept of MEMS and the basic work principle of typical MEMS devices,which selects a certain kind of MEMS gyroscope as test research object,to analyst test parameters. According to the characteristics,each parameter are classified,and test methods of typical parameters are studied. In addition,this paper proposes a MEMS gyroscope test platform based on PXI of NI,and builds a hardware test system platform for MEMS gyroscope with the aid of biaxial rate turntable,shaking table and the thermostat,and expounds the hardware selection of the platform. The software part of the system applies LabVIEW lan?guage,the idea of modular control software for the module partition is adopted,and key points of system software design are dis?cussed.
Keywords：Key Words MEMSPXItest
Publication Date：2019-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 33-36,44 )