The Scheme of On-wafer Vector Network Analyzer Test System Comparison of Values
SUN Xiaoying
SUN Jing
LUAN Peng
WU Aihua
HAN Lihua
LIANG Faguo
Abstract：Currently effective traceable way in the on‐wafer vector network analyzer test system has not been estab‐lished .With the rapid development of the microelectronics industry ,calibration issues of measure in on‐chip mode scattering parameters need to be resolved .To achieve consistent and reliable value ,this paper introduces a scheme of on‐wafer vector network analyzer test system comparison of values ,proposes on‐chip mismatch attenuations as the transfer standard .Statis‐tical methods of the comparison results are discussed in the article ,while removing outlier by two means of statistical meth‐ods ,adopting the arithmetic average value of all laboratory measurement results as the reference value ,deriving the normal‐ized bias based on the case .
Keywords：on-wafer vector network analyzercomparison of valuesreference valuenormalized bias En
Publication Date：2015-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 47-50,58 )