Micro-current Calibration Method of the Semi-conductor Analyzer
QIAO Yu'e
ZHENG Shiqi
LIANG Faguo
DING Liqiang
Abstract：At present, Semi‐conductor analyzer is the most important instrument for I‐V curve test, whose current scale down to pA, and accuracy to 1%. Direct‐Measurement can't realize the mission above. A calibration method on High‐value resistance through “FVMI” method on the basis of the whole calibration scheme is given. In order to solve the problem on micro‐current calibration, an Adapter is fabricated and the Guard technology is studied. The test results validate the cali‐bration method, through compare 1pA to 10nA current with superior metrology department. The research method above has already been applied in “Semiconductor Technics Flow” widely.
Keywords：semi-conductoradapter analyzermicro-currenthigh-value resistanceGuard technology
Publication Date：2015-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 17-20,43 )