Design of Sensor Structure Based on the Combination of Coplanar Waveguide and ELC Resonator
LIU Chuanyu
WANG Yanhong
WU Jingzhi
Abstract：Currently,terahertz has attracted much attention in the field of biomolecular detection.This study proposes a novel terahertz sensing structure using a combination of coplanar waveguide(CPW)and electric LC(ELC)resonator design.The sensing structure consists of an ELC resonator and a CPW structure deposited on the back of the substrate.By optimizing the structural pa-rameters,sensing can be achieved in the 200 GHz～360 GHz frequency band.The principle of the sensing structure is based on the frequency shift of the resonant peak in the transmission coefficient(S21).On the basis of this structure,a microporous structure is added to the capacitance gap of the ELC resonator.When particles pass through the pores,it causes a change in the resonant fre-quency of the resonator.This sensing structure can achieve miniaturized trace sample detection function and can be used for screen-ing particles and biological cells.
Keywords：terahertzcoplanar waveguideELC resonatortransmission coefficientmicropores
Publication Date：2025-11-20
Online Publishing Date：2026-01-28(First online date of this platform, not the publication date of the document)
Pages：5( 211-214,231 )